Scanning electron microscope JSM-6390LV manufactured by «JEOL Ltd.» (Japan) with the INCA Energy Penta FET X3 energy dispersive microanalysis system of «OXFORD Instruments Analytical Limited» (Great Britain).
- Accelerating voltage: up to 30 kV
- Resolution: up to 3 nm
- Instrument magnification: up to ×300 000
- Defined elements: from B to U
- Energy resolution of the detector: 137 eV
Study of the topography and microstructure of the surface of samples and samples (including dielectrics – in low vacuum mode), qualitative and quantitative element microanalysis in the point region, construction of profiles of the distribution of elements along a given line, construction of maps of the distribution of elements in the selected area.
Date of last changes:16.04.2026
